Hermetic Package Leak Rates
| Space Seal | MCL Seal | |
|---|---|---|
0.42 cm3 | 1E-8 atm-cm3/sec Air | 2E-10 atm-cm3/sec Air |
0.58 cm3 | 1E-8 atm-cm3/sec Air | 4.4E-10 atm-cm3/sec Air |
0.68 cm3 | 1E-8 atm-cm3/sec Air | 2E-10 atm-cm3/sec Air |
6.48 cm3 | 1E-8 atm-cm3/sec Air | 1.6E-9 atm-cm3/sec Air |
0.05 cm3 | 1E-9 atm-cm3/sec Air | 4.4E-10 atm-cm3/sec Air |
0.0002 cm3 | 80Au20Sn | 1E-9 atm-cm3/sec Air | 1E-10 atm-cm3/sec Air |
0.005 cm3 | 80Au20Sn | 1E-9 atm-cm3/sec Air | 1E-10 atm-cm3/sec Air |
0.008 cm3 | 80Au20Sn | 1E-9 atm-cm3/sec Air | 1E-10 atm-cm3/sec Air |
0.02 cm3 | 1E-9 atm-cm3/sec Air | 1E-10 atm-cm3/sec Air |
0.05 cm3  | 1E-9 atm-cm3/sec Air | 4.8E-10 atm-cm3/sec Air |